Modeling silicon dots fabrication using self-limiting oxidation
| Autor: | Chen, Yijian ∗, Chen, Yishi |
|---|---|
| Zdroj: | In Microelectronic Engineering 2001 57:897-901 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Chen, Yijian ∗, Chen, Yishi |
|---|---|
| Zdroj: | In Microelectronic Engineering 2001 57:897-901 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect