Copper passivation of boron in Si 1− xGe x alloys and boron reactivation kinetics
| Autor: | Barthula, M., Aboelfotoh, M.O., Meyer, F. * |
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| Zdroj: | In Microelectronic Engineering 2001 55(1):323-328 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Barthula, M., Aboelfotoh, M.O., Meyer, F. * |
|---|---|
| Zdroj: | In Microelectronic Engineering 2001 55(1):323-328 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect