Development of a secondary-electron detection system for high-speed high-sensitivity inspection SEM imaging

Autor:	Takafuji, A., Nozoe, M., Shinada, H.
Zdroj:	In Microelectronic Engineering 2000 53(1):649-652
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect