Thermal desorption study on possible hydrogen sources and diffusion barriers in CMOS technology
| Autor: | Remondina, Jacopo, Portavoce, Alain, Bertoglio, Maxime, Roland, Guillaume, Lorut, Frédéric, Le Friec, Yannick, Benoit, Daniel, Putero, Magali |
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| Zdroj: | In Materials Letters 15 April 2023 337 |
| Databáze: | ScienceDirect |
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