A new approach for producing of film structures based on Si1-xGex
Autor: | Gavrilin, I.M., Grevtsov, N.L., Pavlikov, A.V., Dronov, A.A., Chubenko, E.B., Bondarenko, V.P., Gavrilov, S.A. |
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Zdroj: | In Materials Letters 15 April 2022 313 |
Databáze: | ScienceDirect |
Externí odkaz: |