A new approach for producing of film structures based on Si1-xGex
| Autor: | Gavrilin, I.M., Grevtsov, N.L., Pavlikov, A.V., Dronov, A.A., Chubenko, E.B., Bondarenko, V.P., Gavrilov, S.A. |
|---|---|
| Zdroj: | In Materials Letters 15 April 2022 313 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect