Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition
| Autor: | Khomenkova, L., Chauvat, M.-P., Marie, P., Frilay, C., Lemarié, F., Boudin, S., Portier, X., Ratel-Ramond, N., Labbé, C., Cardin, J., Gourbilleau, F. |
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| Zdroj: | In Materials Letters 15 March 2020 263 |
| Databáze: | ScienceDirect |
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