Synthesis of high-quality AlN films on (La,Sr) (Al,Ta)O3 substrates by pulsed laser deposition
| Autor: | Wang, Wenliang, Yang, Weijia, Liu, Zuolian, Lin, Yunhao, Zhou, Shizhong, Lin, Zhiting, Wang, Haiyan, Qian, Huirong, Li, Guoqiang |
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| Zdroj: | In Materials Letters 15 January 2015 139:483-486 |
| Databáze: | ScienceDirect |
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