Effect of nitrogen pressure on the properties of AlN films grown on nitrided Al(1 1 1) substrates by pulsed laser deposition
| Autor: | Wang, Wenliang, Liu, Zuolian, Yang, Weijia, Lin, Yunhao, Zhou, Shizhong, Qian, Huirong, Wang, Haiyan, Lin, Zhiting, Li, Guoqiang |
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| Zdroj: | In Materials Letters 15 August 2014 129:39-42 |
| Databáze: | ScienceDirect |
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