A new approach for AFM cantilever elaboration with 3C-SiC

Autor: Jiao, S., Michaud, J.F., Portail, M., Madouri, A., Chassagne, T., Zielinski, M., Alquier, D.
Zdroj: In Materials Letters 15 June 2012 77:54-56
Databáze: ScienceDirect