The formation of nanoparticles in laser-induced SiH4 gas reactions

Autor: Kuz'min, G.P., Kononov, N.N., Rozhanskii, N.V., Surkov, A.A., Tikhonevich, O.V.
Zdroj: In Materials Letters 1 February 2012 68:504-506
Databáze: ScienceDirect