Preparation of Zr–Si thin films by a simultaneous deposition and reaction process using pulsed ion beams
| Autor: | Suematsu, H., Kishi, T., Inoue, J., Hirai, M., Suzuki, T., Yunogami, T., Jiang, W., Yatsui, K. |
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| Zdroj: | In Materials Letters 2007 61(17):3635-3638 |
| Databáze: | ScienceDirect |
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