Boron thin film deposition by using Thermionic Vacuum Arc (TVA) technology
Autor: | Akan, T., Ekem, N., Pat, S., Issever, U.G., Balbag, M.Z., Cenik, M.I., Vladoiu, R., Musa, G. |
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Zdroj: | In Materials Letters 2007 61(1):23-26 |
Databáze: | ScienceDirect |
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