Self-aligned Ge and SiGe three-dimensional epitaxy on dense Si pillar arrays
| Autor: | Bergamaschini, R., Isa, F., Falub, C.V., Niedermann, P., Müller, E., Isella, G., von Känel, H., Miglio, L. |
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| Zdroj: | In Surface Science Reports November-December 2013 68(3-4):390-417 |
| Databáze: | ScienceDirect |
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