Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiN xO y thin films

Autor: Radecka, M., Pamula, E., Trenczek-Zajac, A., Zakrzewska, K., Brudnik, A., Kusior, E., Kim-Ngan, N.-T.H., Balogh, A.G.
Zdroj: In Solid State Ionics 2011 192(1):693-698
Databáze: ScienceDirect