A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization
| Autor: | Cai, Haoshu, Feng, Jianshe, Yang, Qibo, Li, Wenzhe, Li, Xiang, Lee, Jay |
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| Zdroj: | In Computers in Industry August 2020 119 |
| Databáze: | ScienceDirect |
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