Surface profile measurement of transparent parallel plates by multi-scale analysis phase-shifting interferometry (MAPSI)
Autor: | Ding, Yifan, Lu, Qi, Liu, Shijie, Zhang, Xu, Chen, Dapeng, Shao, Jianda |
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Zdroj: | In Optics and Lasers in Engineering October 2024 181 |
Databáze: | ScienceDirect |
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