Surface profile measurement of transparent parallel plates by multi-scale analysis phase-shifting interferometry (MAPSI)

Autor: Ding, Yifan, Lu, Qi, Liu, Shijie, Zhang, Xu, Chen, Dapeng, Shao, Jianda
Zdroj: In Optics and Lasers in Engineering October 2024 181
Databáze: ScienceDirect