A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement
| Autor: | Guo, Tong, Ma, Long, Zhao, Jian, Dorantes-Gonzalez, Dante J., Fu, Xing, Hu, Xiaotang |
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| Zdroj: | In Optics and Lasers in Engineering 2011 49(9):1124-1130 |
| Databáze: | ScienceDirect |
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