Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry
| Autor: | Hwang, Young-Min, Yoon, Sung-Won, Kim, Jung-Hwan, Kim, Souk, Pahk, Heui-Jae |
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| Zdroj: | In Optics and Lasers in Engineering 2008 46(2):179-184 |
| Databáze: | ScienceDirect |
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