Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
| Autor: | Lee, Jung-Hwan, Poddar, Maneesh Kumar, Han, Kwang-Min, Ryu, Heon-Yul, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Wada, Yutaka, Hamada, Satomi, Hiyama, Hirokuni, Park, Jin-Goo |
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| Zdroj: | In Polymer Testing October 2020 90 |
| Databáze: | ScienceDirect |
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