Investigation on the machining mechanism of silicon modified by Au ion irradiation in elliptical vibration diamond cutting
| Autor: | Fu, Yufan, Shen, Zhenfeng, Mo, Honglei, Zhang, Jianguo, Chen, Xiao, Xiao, Junfeng, Xu, Jianfeng |
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| Zdroj: | In Precision Engineering December 2024 91:27-35 |
| Databáze: | ScienceDirect |
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