Ion beam smoothing of fused silica at atomic-scale assisted by damage recovery using inductively coupled plasma
| Autor: | Wu, Bing, Liang, Shaoxiang, Zhang, Junqi, Ding, Xuemiao, Chiu, Tom, Huang, Pei, Wang, Yinhui, Deng, Hui |
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| Zdroj: | In Precision Engineering October 2024 90:71-80 |
| Databáze: | ScienceDirect |
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