Design of a vibration isolation platform for atomic force microscope based on flexural structure
| Autor: | Lin, Rui, Li, Yingzi, Qian, Jianqiang, Cheng, Peng, Gao, Xiaodong, Sun, Wendong, Hu, Yifan, Yuan, Quan |
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| Zdroj: | In Precision Engineering August 2024 89:113-120 |
| Databáze: | ScienceDirect |
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