The internal modified layer structure of silicon carbide induced by ultrafast laser and its application in stealth dicing
| Autor: | Xie, Xiaozhu, Liu, Tao, Lv, Kaijun, Huang, Yaoan, Huang, Yajun, Hu, Wei, Long, Jiangyou |
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| Zdroj: | In Precision Engineering June 2024 88:895-904 |
| Databáze: | ScienceDirect |
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