Assessment and verification of thickness homogeneity in mask blank by utilizing main harmonics of triple-surface interferometry
| Autor: | Kim, Sungtae, Kim, Yangjin, Sugita, Naohiko, Mitsuishi, Mamoru |
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| Zdroj: | In Precision Engineering January 2024 85:174-182 |
| Databáze: | ScienceDirect |
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