Design and precision tracking control of a high-bandwidth fast steering mirror for laser beam machining
| Autor: | Zhong, Jianpeng, Nishida, Rina, Shinshi, Tadahiko |
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| Zdroj: | In Precision Engineering January 2022 73:128-139 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect