A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor
| Autor: | Quan, Lue, Shimizu, Yuki, Xiong, Xin, Matsukuma, Hiraku, Gao, Wei |
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| Zdroj: | In Precision Engineering January 2021 67:1-13 |
| Databáze: | ScienceDirect |
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