A high-precision two-dimensional micro-accelerometer for low-frequency and micro-vibrations

Autor: Lei, Ying-Jun, Li, Rui-Jun, Chen, Ruo-Xuan, Zhang, Lian-Sheng, Hu, Peng-Hao, Huang, Qiang-Xian, Fan, Kuang-Chao
Zdroj: In Precision Engineering January 2021 67:419-427
Databáze: ScienceDirect