Material removal efficiency improvement by orientation control of CMP pad surface asperities
| Autor: | Suzuki, Norikazu, Misono, Hirotaka, Shamoto, Eiji, Hashimoto, Yohei, Yasuda, Hozumi, Mochizuki, Yoshihiro |
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| Zdroj: | In Precision Engineering March 2020 62:83-88 |
| Databáze: | ScienceDirect |
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