Hydrostatic ionic liquid-lubricated fluid film bearing for a rotational electron-beam lithography system
| Autor: | Okabe, Takao, Sasaki, Shinya, Kondo, Yukishige, Miyatake, Masaaki, Yoshimoto, Shigeka |
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| Zdroj: | In Precision Engineering January 2020 61:194-203 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect