Investigation of plastic electrode tools for electrochemical machining of silicon
| Autor: | Lyubimov, Victor V., Volgin, Vladimir M., Mescheder, Ulrich, Gnidina, Inna V., Ivanov, Alexey S. |
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| Zdroj: | In Precision Engineering January 2017 47:546-556 |
| Databáze: | ScienceDirect |
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