High-performance facility and techniques for high-precision machining of optical components by ion beams
| Autor: | Chkhalo, N.I., Kaskov, I.A., Malyshev, I.V., Mikhaylenko, M.S., Pestov, A.E., Polkovnikov, V.N., Salashchenko, N.N., Toropov, M.N., Zabrodin, I.G. |
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| Zdroj: | In Precision Engineering April 2017 48:338-346 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect