Parallel-kinematics XYZ MEMS part 2: Fabrication and experimental characterization
| Autor: | Koo, Bonjin, Correa, Jorge E., Ferreira, Placid M. |
|---|---|
| Zdroj: | In Precision Engineering October 2016 46:147-157 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Koo, Bonjin, Correa, Jorge E., Ferreira, Placid M. |
|---|---|
| Zdroj: | In Precision Engineering October 2016 46:147-157 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect