Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy
Autor: | Chen, Yuan-Liu, Zhu, Wu-Le, Yang, Shunyao, Ju, Bing-Feng, Ge, Yue |
---|---|
Zdroj: | In Precision Engineering April 2014 38(2):414-420 |
Databáze: | ScienceDirect |
Externí odkaz: |