A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage
| Autor: | Li, Xinghui, Gao, Wei, Muto, Hiroshi, Shimizu, Yuki, Ito, So, Dian, Songyi |
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| Zdroj: | In Precision Engineering July 2013 37(3):771-781 |
| Databáze: | ScienceDirect |
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