Miniaturised optical encoder for ultra precision metrology systems

Autor: Carr, J., Desmulliez, M.Y.P., Weston, N., McKendrick, D., Cunningham, G., McFarland, G., Meredith, W., McKee, A., Langton, C.
Zdroj: In Precision Engineering 2009 33(3):263-267
Databáze: ScienceDirect