AZ-1518 Photoresist analysis with synchrotron radiation using high-resolution time-of-flight mass spectrometry
| Autor: | Mendes, L.A.V., Pinho, R.R., Ávila, L.F., Lima, C.R.A., Rocco, M.L.M. |
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| Zdroj: | In Polymer Degradation and Stability 2007 92(6):933-938 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect