Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation
| Autor: | Tom, Matthew, Wang, Henrik, Ou, Feiyang, Yun, Sungil, Orkoulas, Gerassimos, Christofides, Panagiotis D. |
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| Zdroj: | In Computers and Chemical Engineering October 2023 178 |
| Databáze: | ScienceDirect |
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