Zeta potential-tunable silica abrasives and fluorinated surfactants in chemical mechanical polishing slurries
| Autor: | Hong, Seungchul, Han, Deoksu, Jang, Keon-Soo |
|---|---|
| Zdroj: | In Wear 15 February 2021 466-467 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hong, Seungchul, Han, Deoksu, Jang, Keon-Soo |
|---|---|
| Zdroj: | In Wear 15 February 2021 466-467 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect