Angular dependences of surface composition, sputtering and ripple formation on silicon under N 2+ ion bombardment
| Autor: | Bachurin, V.I *, Lepshin, P.A, Smirnov, V.K |
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| Zdroj: | In Vacuum 2000 56(4):241-245 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Bachurin, V.I *, Lepshin, P.A, Smirnov, V.K |
|---|---|
| Zdroj: | In Vacuum 2000 56(4):241-245 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect