Mechanical, electrical and optical properties of a-C : H : N films deposited by plasma CVD technique
| Autor: | Chakrabarti, K. *, Basu, M., Chaudhuri, S., Pal, A.K., Hanzawa, H. |
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| Zdroj: | In Vacuum 1999 53(3):405-413 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Chakrabarti, K. *, Basu, M., Chaudhuri, S., Pal, A.K., Hanzawa, H. |
|---|---|
| Zdroj: | In Vacuum 1999 53(3):405-413 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect