Experimental verification of theory for the pumping mechanism of a dry-scroll vacuum pump
| Autor: | Sawada, Tadashi *, Kamada, Shin, Sugiyama, Wataru, Takemoto, Jun-ichi, Haga, Shuji, Tsuchiya, Masaru |
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| Zdroj: | In Vacuum 1999 53(1):233-237 |
| Databáze: | ScienceDirect |
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