Tribological and chemical characterization of ion beam-deposited CN x films

Autor: Quirós, C a, *, Núñez, R a, Prieto, P a, Elizalde, E a, Fernández, A b, Schubert, C c, Donnet, C c, Sanz, JM a
Zdroj: In Vacuum 1999 52(1):199-202
Databáze: ScienceDirect