Growth dynamics dependence of high quality β-Ga2O3 thin films prepared by low pressure chemical vapor deposition
| Autor: | Luo, Hang a, b, 1, Guo, Rongrong a, b, 1, Zheng, Rongsheng a, b, Liang, Longsheng a, b, Cai, Lie a, b, Yang, Yulin a, b, ⁎⁎, Cheng, Zaijun a, b, ⁎ |
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| Zdroj: | In Vacuum March 2025 233 |
| Databáze: | ScienceDirect |
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