Study of TaN and Ta2O5 coatings obtained by sputtering with non-self-sustained gas discharge for biomedical implant modification

Autor: Kravchenko, Yaroslav, Garkusha, Igor, Taran, Anton, Misiruk, Ivan, Tymoshenko, Oleksandr, Diedkova, Kateryna, Pogorielov, Maksym, Romaniuk, Svitlana
Zdroj: In Vacuum January 2025 231 Part A
Databáze: ScienceDirect