Enhancing electrical and thermal property of diamond-based Ta2N films through introducing a Ta transition layer

Autor: Li, Hao, Wang, Yue, Zhang, Mingzhen, Liu, Jinlong, Chen, Liangxian, Jiang, Puqing, Yin, Yuhang, Li, Chengming, Wei, Junjun
Zdroj: In Vacuum December 2024 230
Databáze: ScienceDirect