Modeling the influence of the duration of water vapor pulses on the properties of hafnium oxide synthesized by atomic layer deposition method
| Autor: | Bulyarskiy, Sergey V., Litvinova, Kristina I., L'vov, Pavel E., Rudakov, Grigory A., Gusarov, Georgy G. |
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| Zdroj: | In Vacuum November 2024 229 |
| Databáze: | ScienceDirect |
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