Deposition characteristics and influence regularity of sputtered products in a low-power RF gridded ion thruster
Autor: | Dong, Yicheng, Kong, Weiyi, Wang, Weizong, Zhang, Guangchuan, Han, Mingyue, Wang, Zhehong, Wang, Haibo, Li, Yifei, Fu, Chencong, Li, Xingda |
---|---|
Zdroj: | In Vacuum October 2024 228 |
Databáze: | ScienceDirect |
Externí odkaz: |