Experimental and numerical study of MEMS electrothermal actuators: Comparing dynamic behavior and heat transfer process in vacuum and non-vacuum environments
| Autor: | Kong, Xiaoyu, Cao, Yun, Zhu, Hengbo, Wang, He, Lu, Junlin, Xu, Xiaobin, Nie, Weirong, Xi, Zhanwen |
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| Zdroj: | In Vacuum September 2024 227 |
| Databáze: | ScienceDirect |
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