Performance enhancement of solar-blind UV photodetector by doping silicon in β-Ga2O3 thin films prepared using radio frequency magnetron sputtering
| Autor: | Zhang, Yingnan, Zhang, Min, Hu, Wenbo, Hou, Liyan, Jiang, Shan, Wang, Yuxin, Sun, Jingchang |
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| Zdroj: | In Vacuum September 2024 227 |
| Databáze: | ScienceDirect |
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