Deconvolution of high-resolution depth profiling data with sputtering induced roughness for reconstruction of nano-layer structure
| Autor: | Xu, Yingxuan, Liu, Gongwen, Li, Haiming, Wang, Jiangyong, Lian, Songyou, Xu, Rongwang |
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| Zdroj: | In Vacuum September 2024 227 |
| Databáze: | ScienceDirect |
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